제품정보 (메이커/스펙/옵션/액세서리/장비상태 등) |
maker:kla tencor model:p10(no computer)
Specifications: Sample size: up to 200mm Low force head: 0.05 - 15mg 0.05mg resolution Step heigh repeatability, 0.001μm max. in the 13μm range; 0.005μm max in the 130μm range Scan length: 150mm Scan speed: 1μm/sec to 25mm/sec Scan sampling rates: 50, 100, 200, 500, 1000Hz Vertical range: at 0.008A resolution: ±6.5μm at 0.8A resolutions: ±65μm at 0.6A resolutions: ±1000μm Horizontal resolution at 1μm/sec scan speed: 0.01μm Angle resolution: 0.001°
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