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home > Keithley > S500 and S530 Test Systems

 



  

Feature S500 Integrated Test System S530 Parametric Test System, High Voltage version S530 Parametric Test System, Low Current version

Software

ACS

Primary: KTE
Secondary: ACS

Primary: KTE
Secondary: ACS

Switching

Many system apps have no matrix (SMUs connected directly to DUTs). But 7174A and 7072-HV are also used.

7072-HV High Voltage Matrix

7530 Low Current Matrix
(for S530 only)

SMU

Series 2400, Series 2600B, or Model 4200-SCS

Model 2636B and Model 2410

Model 2636B

System diagnostics

No

Yes

Yes

System specification

No

Yes

Yes

System documentation

No

Yes

Yes

Target application

Range of semiconductor device applications in R&D and production (eg., characterization, reliability, die sort)

Semiconductor process control monitoring (production); typically LDMOS or compound semi process

Semiconductor process control monitoring (production)


Key specifications
S5xx System Type Wiring & Pin Count SMU Channels Max. Voltage Max. Current Standard Options

S530 Low Current Parametric Test System

Up to 48 pins
(4-wire or "Kelvin")

2 to 8

200V (2636B SMU)

1A

C-V, scope-based frequency, and DMM measurements

S530 High Voltage Parametric Test System

Up to 24 pins
(4-wire or "Kelvin")

3 to 7

1000V (2410 SMU),
200V (2636B SMU)

1A

C-V, scope-based frequency, and DMM measurements

S500 Integrated Test System

Up to 60 pins with switch (2-wire), or 32 pins (direct wiring from SMU)

1 to 8 with switch, or 1 to 32 without switch

1000V with 7072-HV switch, or Max voltage of SMU with no switch

1A with switch, or Max current of SMU with no switch

Beyond most SMU measurements, test code can be written by customer or Keithley (for extra service fee) to support wide variety of measurements and hardware


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