S530 Low Current Parametric Test System
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Up to 48 pins (4-wire or "Kelvin")
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2 to 8
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200V (2636B SMU)
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1A
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C-V, scope-based frequency, and DMM measurements
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S530 High Voltage Parametric Test System
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Up to 24 pins (4-wire or "Kelvin")
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3 to 7
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1000V (2410 SMU), 200V (2636B SMU)
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1A
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C-V, scope-based frequency, and DMM measurements
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S500 Integrated Test System
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Up to 60 pins with switch (2-wire), or 32 pins (direct wiring from SMU)
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1 to 8 with switch, or 1 to 32 without switch
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1000V with 7072-HV switch, or Max voltage of SMU with no switch
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1A with switch, or Max current of SMU with no switch
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Beyond most SMU measurements, test code can be written by customer or Keithley (for extra service fee) to support wide variety of measurements and hardware
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