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home > Keithley > 4200-SCS Semiconductor Characterization Systems

 



Features Benefits

Complete solution from DC to Pulse

The Model 4200-SCS supports all aspects of parametric testing, from basic DC I-V and C-V sweeps to advanced ultra-fast I-V, transient, waveform capture and pulsed I-V measurements

Microsoft® Windows® OS and Keithley Interactive Test Environment (KITE)

Familiar Windows GUI combined with over 450 user-modifiable test applications enables user to begin making complicated measurements immediately – no training needed

Modular architecture

The Model 4200-SCS is a configurable and scalable solution. Plug in new capabilities as your test needs change, enabling you to meet today’s and tomorrow’s test challenges. With a modular architecture, your instrumentation investment is protected well into the future.

Nine module slots

Nine slots let you configure the 4200-SCS exactly the way you want; additionally, all slots can be configured with high power or medium power SMUs

0.1fA and 1μV measure resolution

Superior I-V measurement performance with medium or high power SMUs allows for complete characterization of devices and materials

Full range of C-V measurement capability

Supports quasistatic and multi-frequency, quasistatic and very low frequency (VLF) capacitance-voltage (CV) measurements with extensive set of sample programs, test libraries and parameter extraction algorithms

Automatic and semi-automatic wafer prober drivers

Easy test automation without writing code using the built-in wafer prober drivers and test sequencing

High power and fast pulse capability

Supports high voltage pulse generation (up to ±40V) for high power and memory device testing



Key specifications and ordering information
Model Range Measure Resolution Meaure Accuracy Units per chassis, Max.

4200-SMU

± 210 V
± 100 mA

0.1 μV - 100 μV
100 fA - 100 pA

V: 0.01%
I: 0.03%

9

4200-SMU + 4200-PA

± 210 V
± 100 mA

0.1 μV - 100 μV
0.1 fA - 100 pA

V: 0.01%
I: 0.03%

9

4210-SMU

± 210 V
± 1 A

0.1 μV - 100 μV
100 fA - 100 pA

V: 0.01%
I: 0.03%

9

4210-SMU + 4200-PA

± 210 V
± 1 A

0.1 μV - 100 μV
0.1 fA - 100 pA

V: 0.01%
I: 0.03%

9

4200-PA

Extends SMU range, see above

9

4210-CVU

1 kHz – 10 MHz ± 30 V bias (±60 V differential)

1 aF, 1 nSiemens, 0.001 degree

See data sheet

1

4225-PMU

± 40 V, ± 10 V
100 – 800 mA
60 ns – 999 ms pulse width

250 μV, 750 μV
10 ns

V&I: 0.25% of rdg

6

4225-RPM

± 10 V
100 nA – 10 mA
60 ns – 999 ms pulse width

 

I: 0.5% of rdg

9

4220-PGU

1 Hz – 50 MHz
20 ns – 1 s period
10 ns min. pulse width

-

-

1

4200-SCP2

DC – 750 MHz

-

8bit

1

4200-SCP2HR

DC – 250 MHz

-

16bit

1


Switching Solutions
  • 4225-RPM – Switching I-V, C-V, and pulse signals to one pin. Used with the Model 4225-PMU module
  • MMPC – Multi-Measurement Performance Cables, prober kit that simplifies switching and eliminates the need for re-cabling for I-V, C-V, Pulse and Ultra-Fast I-V measurements
  • 707B – Six slot switching matrix mainframe for switching up to eight instrument resources to maximum of 72 pins. Easily integrated with the Model 4200-SCS or the Series 2600B SMUs
  • 708B – Single slot switching matrix mainframe for switching up to eight instrument resources to maximum of 12 pins. Easily integrates with the Model 4200-SCS or the Series 2600B SMUs

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